Fab Engineers Look to Validate, Analyze Real-Time Wafer Contamination in Process Equipment With Slated '09 Release of New WaferSense(R) Airborne Particle Sensor (APS) From CyberOptics Semiconductor, Inc.
The R & D group at a maker of metrology devices for wafer processing equipment, CyberOptics Semiconductor, Inc., has developed a new wireless sensor that allows fab engineers to monitor airborne particles in process equipment to validate and analyze wafer contamination in real-time to reduce wafer scrap and improve die yield with a wafer-like device -- the WaferSense Airborne Particle Sensor (APS).
Remove Frame | Source Image available