Fab Process Engineers Track, Validate Wafer-Transfer Coordinates for Handoff Robots and Establish Preventative Maintenance Schedules With New WaferSense(R) TeachReview(TM) Software From CyberOptics Semiconductor, Inc.
Software engineers at a maker of wireless metrology devices for wafer processing equipment, CyberOptics Semiconductor, Inc., have released and demonstrated software at SEMICON Korea, TeachReview(TM), that allows fab process engineers to track and validate wafer-transfer coordinates for handoff robots and establish preventative maintenance (PM) schedules for the tools.
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