Wafer Processing Engineers at SEMICON West Consider Role of New Particle-Sensing Technology in Validating, Analyzing Real-Time Wafer Contamination During Demo and Launch of New WaferSense(R) APS From CyberOptics Semiconductor, Inc.
CyberOptics Semiconductor developed the new WaferSense(R) Airborne Particle Sensor (APS) to allow engineers to efficiently detect and classify particles and their exact sources in a process as wafers are transferred, slit valves actuate and chambers are cycled, pumped down and purged. The APS is compatible with front-ends, coater/developer tracks, deposition and etch equipment.
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